Removing Atomic Layers from Nanostructures with Thermal ALE

Thermal Atomic layer etching (ALE) is a recently developed technique to fabricate nanostructures with high precision. While not yet as scalable as other techniques, it shows promising application possibilities. To improve the power of integrated circuits such as CPUs, we need to build finer structures of transistors that can store the information used in electronic […]

Removing Atomic Layers from Nanostructures with Thermal ALE Read More »